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AMS-2000 is very useful to improve the yield of Semiconductor device products. The concentration of ammonia gas and other acidic gases(F, Cl, Br, NOx, SOx and PO43-) can be measured automatically, continuously with short analysis time and with high sensitivity.
AMS-2000 can measure a low concentration of ammonia and various acidic gases with high sensitivity (10pptv), with short analysis time (20min) for each samples, continuously. The analysis methods are Ion Selective Electrode (ISE) for ammonia and Ion chromatography (IC) for acidic gases, which are very reliable.
The contamination to the sample is extremely reduced by using annular denude and automatic operation. The data and graph of concentration can be monitored on the display of the internal computer. 6 points samples can be measured at maximum
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